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Ultra C Tahoe tool is also now capable of removing YX nanoparticles for the most advanced logic memory applications, with an additional smaller particle filtering system. It combines a batch wafer ...

Graphene is synthesized using Plasma Enhanced Chemical Vapor Deposition (PECVD) method in this work ... four-factor and five-order interactions are negligible and the system is dominated by main ...

The experimental setup also includes a nebulizer system, used in the plasma deposition process ... Tetrakis(trimethylsilyloxy)silane for nanostructured SiO 2-like films deposited by PECVD at ...

Jan. 15, 2025 — New observational data and simulation models have confirmed a new type of planet unlike anything found in the Solar System. This provides another piece of the puzzle to ...

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Graduate school of engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan Center for low-temperature plasma sciences, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, ...